Boron-doped amorphous carbon deposited by DC sputtering for a hardmask: Microstructure and dry etching properties
Sung‐Tae Kim, Ung-gi Kim, Jinseok Ryu, Do Kyun Kim, Miyoung Kim, Young‐Chang Joo, Soyeon Lee
Topics & Concepts
BoronMaterials scienceSputteringSecondary ion mass spectrometryAnalytical Chemistry (journal)MicrostructureSputter depositionScanning electron microscopeDopingAmorphous solidChemical engineeringComposite materialThin filmNanotechnologyChemistryIonOptoelectronicsOrganic chemistryEngineeringDiamond and Carbon-based Materials ResearchSemiconductor materials and devicesMetal and Thin Film Mechanics