Mechanical removal of SiC by multi-abrasive particles in fixed abrasive polishing using molecular dynamics simulation
Piao Zhou, Nannan Zhu, Chengyu Xu, Fengli Niu, Jun Li, Yongwei Zhu
Topics & Concepts
AbrasivePolishingMaterials scienceAsperity (geotechnical engineering)Molecular dynamicsDiamondChemical-mechanical planarizationComposite materialNanoscopic scaleNano-NanotechnologyChemistryComputational chemistryAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchAdvanced materials and composites