High-temperature threshold of damage of SiC by swift heavy ions

D. I. Zainutdinov, В. А. Бородин, С. Горбунов, Nikita Medvedev, R.A. Rymzhanov, М. В. Сорокин, R. Voronkov, А. Е. Волков

2025Journal of Alloys and Compounds9 citationsDOI

Topics & Concepts

Swift heavy ionSwiftHeavy ionMaterials scienceIonEngineering physicsEnvironmental scienceOptoelectronicsChemistryPhysicsAstrophysicsOrganic chemistryFluenceIon-surface interactions and analysisIntegrated Circuits and Semiconductor Failure AnalysisSemiconductor materials and devices