MD simulation of two-temperature model in ion irradiation of 3C-SiC: Effects of electronic and nuclear stopping coupling, ion energy and crystal orientation
Jintong Wu, Zongwei Xu, Junlei Zhao, Mathias Rommel, K. Nordlund, Fei Ren, Fengzhou Fang
Topics & Concepts
IonAtomic physicsIonizationSilicon carbideStopping powerIrradiationIon implantationMaterials scienceCoupling (piping)Radiation damageChemistryNuclear physicsPhysicsMetallurgyOrganic chemistrySilicon Carbide Semiconductor TechnologiesSemiconductor materials and devicesIon-surface interactions and analysis