The effect of temperature on monocrystalline Si nanoindentation side effects: A molecular dynamics study
Ziteng Li, S. Kang, Dongxu Wu, Mingjun Ren, Xinquan Zhang, Jin Lei, Li‐Min Zhu, Duo Li, Duo Li
Topics & Concepts
NanoindentationMonocrystalline siliconDynamics (music)Molecular dynamicsMaterials scienceSiliconChemistryNanotechnologyChemical physicsMetallurgyPhysicsComputational chemistryAcousticsMetal and Thin Film MechanicsAdvanced Surface Polishing TechniquesSemiconductor materials and devices