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Ion beam tools for nondestructive in-situ and in-operando composition analysis and modification of materials at the Tandem Laboratory in Uppsala

Petter Ström, Daniel Primetzhofer

2022Journal of Instrumentation152 citationsDOIOpen Access PDF

Abstract

Abstract Ion accelerators have demonstrated tremendous versatility in their research applications throughout several decades. Starting predominantly as nuclear physics tools, they subsequently provided novel insights into fundamental atomic physics. Nowadays small and medium size accelerators are routinely employed in several branches of materials science. As research questions increasingly drive the need for analyses and material modification experiments performed in-situ and/or in-operando, facilities must adapt to service such a need. In this work, we highlight capabilities for in-situ and in-operando composition depth profiling and materials modification, developed with instrumentation at the Tandem Laboratory at Uppsala University. An overview of available ion sources and accelerators is given. We then exemplify the specific capabilities of the available end stations for materials synthesis, sample modification and device operation either during simultaneous ion beam based characterization or with such characterization performed in-situ before and after the application of various modification steps. Describing specific recent examples and potential future applications, we illustrate the impact of the present national research infrastructure.

Topics & Concepts

Characterization (materials science)Instrumentation (computer programming)Tandem acceleratorIon beam analysisIn situIon beamSystems engineeringNanotechnologyTandemProfiling (computer programming)Materials scienceComputer scienceEngineering physicsIonEngineeringPhysicsQuantum mechanicsMeteorologyComposite materialOperating systemIon-surface interactions and analysisElectron and X-Ray Spectroscopy TechniquesIntegrated Circuits and Semiconductor Failure Analysis
Ion beam tools for nondestructive in-situ and in-operando composition analysis and modification of materials at the Tandem Laboratory in Uppsala | Litcius