Atomic-scale surface of fused silica induced by chemical mechanical polishing with controlled size spherical ceria abrasives
Guanghong Xu, Zhenyu Zhang, Fanning Meng, Lu Liu, Dongdong Liu, Chunjing Shi, Xiangxiang Cui, Jianmei Wang, Wei Wen
Topics & Concepts
Materials scienceChemical-mechanical planarizationSlurryPolishingSurface roughnessX-ray photoelectron spectroscopyNanometreBrittlenessSurface finishGrindingChemical engineeringComposite materialNanotechnologyEngineeringAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchForce Microscopy Techniques and Applications