Scalable integration of hybrid high-κ dielectric materials on two-dimensional semiconductors
Yongshan Xu, Teng Liu, Kailang Liu, Yinghe Zhao, Lei Liu, Penghui Li, Anmin Nie, Lixin Liu, Jun Yu, Xinliang Feng, Fuwei Zhuge, Huiqiao Li, Xinran Wang, Tianyou Zhai
Topics & Concepts
Materials scienceSemiconductorOptoelectronicsDielectricMolybdenum disulfideTransistorMonolayerNanotechnologyField-effect transistorAtomic layer depositionLayer (electronics)VoltageElectrical engineeringComposite materialEngineering2D Materials and ApplicationsElectronic and Structural Properties of OxidesSemiconductor materials and devices