Mechanical-chemical synergy in photochemical mechanical polishing monocrystalline yttrium aluminum garnet: An integrated machine learning, response surface, and mathematical methodology
Xingchen Guo, Jinxing Huang, Zhigang Dong, Renke Kang, Shang Gao
Topics & Concepts
PolishingMaterials scienceMonocrystalline siliconYttriumAluminiumResponse surface methodologyNonlinear systemMathematical modelLaserArtificial neural networkWork (physics)SofteningMetallurgyMechanical engineeringProcess engineeringSurface (topology)Composite materialExperimental dataOptoelectronicsStructural materialQuality (philosophy)EvaporationLaser Material Processing TechniquesAdvanced Surface Polishing TechniquesNonlinear Optical Materials Studies