A Wireless, Mechanically Flexible, 25μm-Thick, 65,536-Channel Subdural Surface Recording and Stimulating Microelectrode Array with Integrated Antennas
Nanyu Zeng, Tae‐Sung Jung, Mohit Sharma, Guy Eichler, Jason D. Fabbri, R. Cotton, Eleonora F. Spinazzi, Brett E. Youngerman, Luca P. Carloni, Kenneth L. Shepard
Abstract
This paper presents a fully wireless microelectrode array (MEA) system-on-chip (SoC) with 65,536 electrodes for non-penetrative cortical recording and stimulation, featuring a total sensing area of 6.8mm×7.4mm with a 26.5μm×29μm electrode pitch. Sensing, data telemetry, and powering are monolithically integrated on a single chip, which is made mechanically flexible to conform to the surface of the brain by substrate removal to a total thickness of 25μm allowing it to be contained entirely in the subdural space under the skull.
Topics & Concepts
MicroelectrodeElectrodeMaterials scienceSubstrate (aquarium)Multielectrode arrayWirelessChipAperture (computer memory)Electrode arrayTelemetryOptoelectronicsBiomedical engineeringElectrical engineeringComputer scienceAcousticsPhysicsEngineeringTelecommunicationsGeologyQuantum mechanicsOceanographyNeuroscience and Neural EngineeringEEG and Brain-Computer InterfacesTactile and Sensory Interactions