Piezoelectric Biosensor based on ultrasensitive MEMS system
Ji‐Huan He, Chun‐Hui He, Man-Yu Qian, Abdulrahman Ali Alsolami
Topics & Concepts
Microelectromechanical systemsBiosensorPiezoelectricityNanotechnologyMaterials scienceEngineeringElectronic engineeringElectrical engineeringAdvanced Sensor and Energy Harvesting MaterialsGas Sensing Nanomaterials and SensorsAdvanced MEMS and NEMS Technologies