Development of titanium nitride thin film microheaters using laser micromachining
M.A. Jithin, K. Ganapathi, M. Ambresh, Pavan Nukala, N.K. Udayashankar, S. Mohan
Topics & Concepts
MicroheaterMaterials scienceTinTitanium nitrideThin filmSurface micromachiningSputteringOptoelectronicsNitrideSputter depositionFabricationNanotechnologyMetallurgyLayer (electronics)Alternative medicineMedicinePathologyMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchPlasma Diagnostics and Applications