Sapphire Wafer for 226 nm Far UVC Generation with Carbon Nanotube-Based Cold Cathode Electron Beam (C-Beam) Irradiation
Sung Tae Yoo, Kyu Chang Park
Abstract
. Far UVC generation depends on the input power and the crystallinity of sapphire wafers.
Topics & Concepts
Materials scienceOptoelectronicsWaferCarbon nanotubeIrradiationSapphireOpticsCathode rayCathodeNanotechnologyElectronChemistryLaserPhysicsNuclear physicsQuantum mechanicsPhysical chemistryGaN-based semiconductor devices and materialsThermal Radiation and Cooling Technologies