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Aluminium surface work hardening enables multi-scale 3D lithography

Lang Wang, Hangtong Li, Chen Zhao, Liqiang Zhang, Jiye Li, Salah Ud Din, Zichen Wang, Jiacheng Sun, S. A. Galindo‐Torres, Zhiyong Fan, Liaoyong Wen

2024Nature Materials31 citationsDOI

Topics & Concepts

Materials scienceAluminiumLithographyNanotechnologyWork hardeningWork (physics)Nanoscopic scaleScale (ratio)MetallurgyMechanical engineeringOptoelectronicsEngineeringMicrostructureQuantum mechanicsPhysicsNanofabrication and Lithography TechniquesAdvancements in Photolithography TechniquesAdditive Manufacturing and 3D Printing Technologies
Aluminium surface work hardening enables multi-scale 3D lithography | Litcius