Effects of silicon doping on the chemical bonding states and properties of nitrogen-doped diamond-like carbon films by plasma-enhanced chemical vapor deposition
Kuniaki Nakamura, Haruhiko Ohashi, Yoshiharu Enta, Yoshiaki Kobayashi, Yushi Suzuki, Maki Suemitsu, H. Nakazawa
Topics & Concepts
Materials scienceChemical vapor depositionDiamond-like carbonDopingPlasma-enhanced chemical vapor depositionCarbon filmSiliconHeterojunctionAnnealing (glass)Thin filmCarbon fibersChemical bondChemical engineeringAnalytical Chemistry (journal)NanotechnologyComposite materialOptoelectronicsChemistryComposite numberOrganic chemistryEngineeringDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsCarbon Nanotubes in Composites