Reducing the oxygen vacancy concentration in SrTiO3-δ thin films via an optimized O2 plasma treatment for enhancing device properties
Ji-Yeop Kim, Mi‐Jin Jin, Bo Hou, Minsoo P. Kim, Doo‐Seung Um, Chang-Il Kim, Doo‐Seung Um, Chang-Il Kim
Topics & Concepts
Materials scienceStrontium titanateThin filmFabricationSputteringOxygenPerovskite (structure)Oxygen sensorConductivityNanotechnologyPlasmaOptoelectronicsChemical engineeringChemistryPhysical chemistryAlternative medicineQuantum mechanicsMedicineEngineeringPathologyOrganic chemistryPhysicsElectronic and Structural Properties of OxidesFerroelectric and Piezoelectric MaterialsSemiconductor materials and devices