Highly efficient UV-Ozone treatment for IAZO active layer to facilitate the low temperature fabrication of high performance thin film transistors
Weidong Xu, Jianfeng Jiang, Lin Han, Xianjin Feng
Topics & Concepts
Materials scienceThin-film transistorThreshold voltageOzoneOptoelectronicsAnnealing (glass)Electron mobilityTransistorFabricationThin filmAnalytical Chemistry (journal)NanotechnologyLayer (electronics)Composite materialVoltageElectrical engineeringChemistryEngineeringAlternative medicineMedicineOrganic chemistryPathologyChromatographyThin-Film Transistor TechnologiesZnO doping and propertiesSemiconductor materials and devices