Design, analysis and fabrication of a novel hybrid electrothermal microgripper in microassembly cell
Hamed Majidi Fard-Vatan, Mohsen Hamedi
Topics & Concepts
FabricationMultiphysicsActuatorMicrofabricationMicroelectromechanical systemsMechanical engineeringFinite element methodMaterials scienceDisplacement (psychology)MicroactuatorPiezoelectricityComputer scienceNanotechnologyStructural engineeringEngineeringComposite materialAlternative medicinePsychotherapistPathologyArtificial intelligenceMedicinePsychologyAdvanced MEMS and NEMS TechnologiesPiezoelectric Actuators and ControlForce Microscopy Techniques and Applications