Litcius/Paper detail

Design, analysis and fabrication of a novel hybrid electrothermal microgripper in microassembly cell

Hamed Majidi Fard-Vatan, Mohsen Hamedi

2020Microelectronic Engineering40 citationsDOI

Topics & Concepts

FabricationMultiphysicsActuatorMicrofabricationMicroelectromechanical systemsMechanical engineeringFinite element methodMaterials scienceDisplacement (psychology)MicroactuatorPiezoelectricityComputer scienceNanotechnologyStructural engineeringEngineeringComposite materialAlternative medicinePsychotherapistPathologyArtificial intelligenceMedicinePsychologyAdvanced MEMS and NEMS TechnologiesPiezoelectric Actuators and ControlForce Microscopy Techniques and Applications