Microstructure and bending piezoelectric characteristics of AlN film for high-frequency flexible SAW devices
Kaixuan Li, Fang Wang, Meng Deng, Kai Hu, Dianyou Song, Yaowu Hao, Huanhuan Di, Kaifei Dong, Shuo Yan, Zhitang Song, Kailiang Zhang
Topics & Concepts
Materials sciencePiezoelectricityMicrostructureBendingSurface acoustic waveOptoelectronicsSurface roughnessNitrideSputteringComposite materialStack (abstract data type)AcousticsLayer (electronics)Thin filmComputer scienceNanotechnologyProgramming languagePhysicsAcoustic Wave Resonator TechnologiesAdvanced Sensor and Energy Harvesting MaterialsFerroelectric and Piezoelectric Materials