Hot target magnetron sputtering process: Effect of infrared radiation on the deposition of titanium and titanium oxide thin films
Robin Graillot-Vuillecot, Anne‐Lise Thomann, Thomas Lecas, C. Cachoncinlle, Éric Millon, Amaël Caillard
Topics & Concepts
Materials scienceSputter depositionThin filmTitaniumArgonAnataseSputteringCrystallinityCavity magnetronCrystalliteSubstrate (aquarium)Deposition (geology)Analytical Chemistry (journal)Composite materialMetallurgyNanotechnologyChemistryPhotocatalysisGeologyOrganic chemistryChromatographyBiochemistryOceanographySedimentCatalysisPaleontologyBiologyMetal and Thin Film MechanicsHigh-Temperature Coating BehaviorsZnO doping and properties