Mechanism of annealing effect on damage threshold enhancement of HfO2 films in vacuum
Liu Ji, Xiulan Ling, Xiaofeng Liu
Topics & Concepts
Annealing (glass)Materials scienceLaserIrradiationStoichiometryComposite materialOpticsChemistryPhysicsNuclear physicsOrganic chemistryIntegrated Circuits and Semiconductor Failure AnalysisSemiconductor materials and devicesLaser Material Processing Techniques