Study on uniform size and spherical CeO2 abrasives synthesized by two-step method and their chemical mechanical polishing performances
Ning Xu, Yu Lin, Yuxin Luo, Jiahui Ma, Jiaguo Yu, Kailong Gao, Ziheng Gao, Zhuo Wang
Topics & Concepts
Materials sciencePolishingChemical-mechanical planarizationComposite materialMetallurgyAdvanced Surface Polishing TechniquesAdvanced materials and compositesDiamond and Carbon-based Materials Research