Elastic modulus and hardness of cubic GaN grown by molecular beam epitaxy obtained by nanoindentation
S.A. García Hernández, V.D. Compeán-García, E. Luna, M. A. Vidal
Topics & Concepts
NanoindentationMaterials scienceMolecular beam epitaxyThin filmGallium nitrideComposite materialElastic modulusModulusEpitaxyPhase (matter)NitrideDiffractionCrystallographyOpticsNanotechnologyChemistryLayer (electronics)Organic chemistryPhysicsMetal and Thin Film MechanicsGaN-based semiconductor devices and materialsSemiconductor materials and devices