High-performance boron emitters for tunnel oxide passivating contact solar cells enabled by multi-layer PECVD-deposited boron source structures
Haojiang Du, Xian Zhang, Wei Liu, Zunke Liu, Huan Pu, Zhiqin Ying, Xi Yang, Zhenhai Yang, Yuheng Zeng, Yuheng Zeng, Xi Yang
Topics & Concepts
BoronPlasma-enhanced chemical vapor depositionLayer (electronics)Materials scienceOxideOptoelectronicsPassivationNanotechnologySiliconChemistryMetallurgyOrganic chemistrySilicon and Solar Cell TechnologiesIntegrated Circuits and Semiconductor Failure AnalysisSemiconductor materials and interfaces