Amorphous Ge-Se-S chalcogenide alloys via post plasma sulfurization of atomic layer deposition GeSe for ovonic threshold switch applications
Sukhwan Jun, Seunggi Seo, Seungwon Park, Tae Hyun Kim, Minkyu Lee, Seok Man Hong, Taehoon Kim, Seung‐min Chung, Taeyoon Lee, Myoungsub Kim, Hyungjun Kim, Myoungsub Kim, Hyungjun Kim
Topics & Concepts
ChalcogenideAtomic layer depositionTernary operationAmorphous solidMaterials scienceThin filmThreshold voltageAtomic radiusOptoelectronicsPhase-change memoryAnalytical Chemistry (journal)Layer (electronics)NanotechnologyVoltageCrystallographyChemistryTransistorPhysicsProgramming languageChromatographyOrganic chemistryQuantum mechanicsComputer sciencePhase-change materials and chalcogenidesSemiconductor materials and interfacesChalcogenide Semiconductor Thin Films