Preferential zinc sputtering during the growth of aluminum doped zinc oxide thin films by radio frequency magnetron sputtering
Kion Norrman, Poul Norby, Eugen Stamate
Abstract
Zn depletion by energetic negative oxygen ion re-sputtering is one of the main factors influencing the optoelectronic properties of aluminum doped zinc oxide thin films deposited by RF magnetron sputtering.
Topics & Concepts
ZincMaterials scienceSputteringDopingSputter depositionThin filmAluminiumMetallurgyOptoelectronicsNanotechnologyZnO doping and propertiesGas Sensing Nanomaterials and SensorsGa2O3 and related materials