Effect of oxygen flow ratio on the performance of RF magnetron sputtered Sn-doped Ga2O3 films and ultraviolet photodetector
Chen Wang, Wei‐Hang Fan, Yuchao Zhang, Pin-Chun Kang, Wan-Yu Wu, Dong‐Sing Wuu, Shui‐Yang Lien, Wen‐Zhang Zhu
Topics & Concepts
Materials scienceSputter depositionDopingPhotodetectorAmorphous solidOptoelectronicsSputteringUltravioletThin filmAnalytical Chemistry (journal)OxygenNanotechnologyChemistryChromatographyOrganic chemistryGa2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques