The performance of a novel nano-SiO2 dispersion solutions for the chemical-mechanical polishing of sapphire
Jianning Chu, Jia‐Tong Ren, Changlin Liu, Chupeng Zhang, Baoyi Zhu, Xiao Chen
Topics & Concepts
PolishingSapphireNano-Chemical-mechanical planarizationDispersion (optics)Materials scienceNanotechnologyComposite materialChemical engineeringOpticsPhysicsEngineeringLaserAdvanced Surface Polishing TechniquesMinerals Flotation and Separation TechniquesPhotonic Crystals and Applications