Residual stress and tribological behavior of hydrogen-free Al-DLC films prepared by HiPIMS under different bias voltages
Chao-Qian Guo, Haiqing Li, Ya-Li Peng, Mingjiang Dai, Songsheng Lin, Qian Shi, Chunbei Wei
Topics & Concepts
Materials scienceHigh-power impulse magnetron sputteringResidual stressTribologyHydrogenComposite materialVoltageMetallurgyStress (linguistics)Forensic engineeringThin filmSputter depositionNanotechnologySputteringElectrical engineeringLinguisticsPhilosophyEngineeringOrganic chemistryChemistryMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchBoron and Carbon Nanomaterials Research