A multiscale model for CVD growth of silicon carbide
Kang Guan, Qingfeng Zeng, Yongsheng Liu, Xingang Luan, Zhenya Lu, Jianqing Wu
Topics & Concepts
Chemical vapor depositionKinetic Monte CarloMaterials scienceDeposition (geology)Multiscale modelingMechanicsFinite volume methodAtomic unitsThin filmGrain boundaryMonte Carlo methodMomentum (technical analysis)Statistical physicsChemistryNanotechnologyPhysicsComposite materialComputational chemistryMicrostructureMathematicsEconomicsQuantum mechanicsStatisticsBiologyPaleontologyFinanceSedimentSilicon Carbide Semiconductor TechnologiesAdvanced ceramic materials synthesisCopper Interconnects and Reliability