Sputtered titanium nitride films with finely tailored surface activity and porosity for high performance on-chip micro-supercapacitors
Nana Sun, Dayu Zhou, Wenwen Liu, Aikui Li, Yunpeng Su, Peng Jiang, Yaozhong Zou, Shuyan Shi, Feng Liu
Topics & Concepts
Materials scienceSupercapacitorFabricationMicroelectronicsTitanium nitrideCapacitanceNanotechnologyTinEnergy storageElectrodePorosityOptoelectronicsNitrideComposite materialMetallurgyLayer (electronics)ChemistryPower (physics)PhysicsAlternative medicinePhysical chemistryMedicineQuantum mechanicsPathologySupercapacitor Materials and FabricationMXene and MAX Phase MaterialsAdvancements in Battery Materials