Pulsed laser deposition of the protective and Anti-reflective DLC film
Yimin Lu, Guojun Huang, Sai Wang, Lin Xi, Guanghu Qin, Jingsong Wei, Xia Chen
Topics & Concepts
Materials scienceLayer (electronics)CorrosionPulsed laser depositionTransmittanceOxygenDopingComposite materialSiliconMetallurgyThin filmOptoelectronicsNanotechnologyOrganic chemistryChemistryDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsBoron and Carbon Nanomaterials Research