Enhancing the electric charge output in LiNbO<sub>3</sub>-based piezoelectric pressure sensors
Wenhao Xu, Wenping Geng, Huiyi Zhang, Wenxiao Fu, Zihan Wang, Jiahe Li, Xiaojun Qiao, Yichi Zhang, Xiujian Chou
Abstract
or silicon, thus providing a possible method for integrating piezoelectric pressure sensors and integrated circuits.
Topics & Concepts
PiezoelectricitySensitivity (control systems)Materials sciencePiezoelectric sensorCharge (physics)Pressure sensorOptoelectronicsAcousticsElectronic engineeringPhysicsEngineeringComposite materialThermodynamicsQuantum mechanicsAdvanced Sensor and Energy Harvesting MaterialsAdvanced Fiber Optic SensorsGas Sensing Nanomaterials and Sensors