n-Type doping of diamond by hot-filament chemical vapor deposition growth with phosphorus incorporation
Yūki Katamune, Daichi Mori, Daisuke Arikawa, Akira Izumi, Takehiro Shimaoka, Kimiyoshi Ichikawa, Satoshi Koizumi
Topics & Concepts
Chemical vapor depositionDiamondAtmospheric temperature rangeEpitaxyAnalytical Chemistry (journal)DopantTungstenSecondary ion mass spectrometryMaterials scienceDopingChemistryNanotechnologyIonOptoelectronicsMetallurgyMeteorologyChromatographyOrganic chemistryPhysicsLayer (electronics)Diamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsSemiconductor materials and devices