Structure and optical properties of HfO2 films on Si (100) substrates prepared by ALD at different temperatures
Sai Li, Yong Zhang, Dewei Yang, Wen Yang, Xiaobo Chen, Hengli Zhao, Jing Hou, Peizhi Yang
Topics & Concepts
Materials scienceSubstrate (aquarium)Thin filmRaman spectroscopyWaferRefractive indexSurface roughnessAnalytical Chemistry (journal)OptoelectronicsOpticsNanotechnologyComposite materialChemistryOceanographyGeologyChromatographyPhysicsSemiconductor materials and devicesZnO doping and propertiesElectronic and Structural Properties of Oxides