3D Modeling and optimization of SiC deposition from CH3SiCl3/H2 in a commercial hot wall reactor
Balamurugan Deivendran, V. M. Shinde, Harish Kumar, N. Eswara Prasad
Topics & Concepts
Grashof numberReynolds numberMaterials scienceDeposition (geology)MechanicsResponse surface methodologyComputational fluid dynamicsBuoyancyNatural convectionThermodynamicsChemistryHeat transferPhysicsNusselt numberChromatographyTurbulencePaleontologyBiologySedimentSilicon Carbide Semiconductor TechnologiesSemiconductor materials and devicesHigh-Temperature Coating Behaviors