Litcius/Paper detail

MEMS piezoelectric sensor for self-powered devices: A review

Mohini Sawane, Mahanth Prasad

2023Materials Science in Semiconductor Processing105 citationsDOI

Topics & Concepts

Microelectromechanical systemsPiezoelectricityEnergy harvestingElectronicsMaterials scienceNanogeneratorWearable computerElectrical engineeringComputer scienceNanotechnologyEngineeringEnergy (signal processing)Embedded systemStatisticsMathematicsInnovative Energy Harvesting TechnologiesAdvanced Sensor and Energy Harvesting MaterialsWireless Power Transfer Systems