Wafer map defect recognition based on deep transfer learning-based densely connected convolutional network and deep forest
Jianbo Yu, Zongli Shen, Shijin Wang
Topics & Concepts
Computer scienceTransfer of learningConvolutional neural networkWaferDeep learningArtificial intelligenceFeature (linguistics)Pattern recognition (psychology)Layer (electronics)Process (computing)Semiconductor device fabricationMaterials scienceOptoelectronicsComposite materialOperating systemPhilosophyLinguisticsIndustrial Vision Systems and Defect DetectionIntegrated Circuits and Semiconductor Failure AnalysisAdvancements in Photolithography Techniques