Deposition rate controls nucleation and growth during amorphous/nanocrystalline competition in sputtered Zr-Cr thin films
Q. Liebgott, Alejandro Borroto, Zil Fernández-Gutiérrez, Stéphanie Bruyère, Frank Mücklich, David Horwat
Topics & Concepts
CrystalliteNucleationNanocrystalline materialAmorphous solidMaterials scienceThin filmSputter depositionTransmission electron microscopyCrystallographyScanning electron microscopePhase (matter)SputteringAnalytical Chemistry (journal)MineralogyChemical engineeringComposite materialNanotechnologyChemistryMetallurgyEngineeringOrganic chemistryChromatographyHigh-Temperature Coating BehaviorsCopper Interconnects and ReliabilityMetallic Glasses and Amorphous Alloys