Ultrasensitive nitric oxide gas sensors based on Ti-doped ZnO nanofilms prepared by RF magnetron sputtering system
Baktiyar Soltabayev, Ahmad Ajjaq, G. Yergaliuly, Yerkebulan Kadyrov, Amanzhol Turlybekuly, Selim Acar, Almаgul Mentbayeva
Topics & Concepts
Wurtzite crystal structureMaterials scienceSputter depositionDopingSputteringResponsivitySelectivityCavity magnetronTitaniumAnalytical Chemistry (journal)OptoelectronicsNanotechnologyChemical engineeringThin filmMetallurgyZincChemistryBiochemistryChromatographyEngineeringCatalysisPhotodetectorGas Sensing Nanomaterials and SensorsZnO doping and propertiesAnalytical Chemistry and Sensors