Role of interatomic potentials in molecular dynamics simulations of silicon nanomachining
Yifan Li, Liangchi Zhang
Topics & Concepts
Molecular dynamicsSiliconMaterials scienceInteratomic potentialDynamics (music)NanotechnologyChemical physicsEngineering physicsOptoelectronicsPhysicsQuantum mechanicsAcousticsAdvanced Surface Polishing TechniquesForce Microscopy Techniques and ApplicationsDiamond and Carbon-based Materials Research