Top-down micro and nano structuring of wide bandgap semiconductors for ultraviolet photodetection
Ramit Kumar Mondal, You Jin Kim, Yikai Liao, Zhihua Zheng, Jiangnan Dai, Munho Kim
Abstract
This review focuses on top-down dry and wet etching of III-nitrides, SiC, Ga 2 O 3 , and diamond to create micro/nanostructured UV photodetectors, enabling enhanced light trapping and improved device performance.
Topics & Concepts
PhotodetectionMaterials scienceSemiconductorUltravioletBand gapStructuringOptoelectronicsNano-NanotechnologyPhotodetectorComposite materialEconomicsFinanceGa2O3 and related materialsPhotocathodes and Microchannel PlatesNanowire Synthesis and Applications