Computational exploration of SF6 adsorption and decomposition on SiGe and calcium-decorated SiGe surfaces
Jabir H. Al‐Fahemi, Kamal A. Soliman
Topics & Concepts
Materials scienceDecompositionAdsorptionCalciumSilicon-germaniumNanotechnologyEngineering physicsOptoelectronicsChemistrySiliconMetallurgyEngineeringPhysical chemistryOrganic chemistrySemiconductor materials and devicesZnO doping and propertiesGaN-based semiconductor devices and materials