Design of a redundant actuated 4-PPR planar 3-DOF compliant nanopositioning stage
Miao Yang, Mingyang Sun, Zhe Wu, Jianhua Li, Long Yi
Topics & Concepts
Compliant mechanismVoice coilPlanarStiffnessDecoupling (probability)Control theory (sociology)ActuatorStage (stratigraphy)Computer scienceFinite element methodEngineeringMechanical engineeringStructural engineeringControl engineeringMagnetBiologyPaleontologyArtificial intelligenceComputer graphics (images)Control (management)Piezoelectric Actuators and ControlForce Microscopy Techniques and ApplicationsIterative Learning Control Systems