Growth, structural and electrical properties of AlN/Si (111) for futuristic MEMS applications
Akhilesh Pandey, Shankar Dutta, Janesh K Kaushik, Nidhi Gupta, Garima Gupta, R. Raman, Davinder Kaur
Topics & Concepts
Materials scienceWurtzite crystal structureDielectricMicroelectromechanical systemsSputter depositionOptoelectronicsCrystalliteThin filmSiliconSubstrate (aquarium)PiezoelectricitySputteringComposite materialNanotechnologyMetallurgyZincGeologyOceanographyAcoustic Wave Resonator TechnologiesGaN-based semiconductor devices and materialsAdvanced MEMS and NEMS Technologies