A 2-DOF nano-positioning scanner with novel compound decoupling-guiding mechanism
Fujun Wang, Xiaolu Zhao, Zhichen Huo, Beichao Shi, Cunman Liang, Yanling Tian, Dawei Zhang
Topics & Concepts
Decoupling (probability)Mechanism (biology)ScannerNano-Control theory (sociology)EngineeringComputer scienceSimulationNanotechnologyControl engineeringPhysicsArtificial intelligenceMaterials scienceChemical engineeringControl (management)Quantum mechanicsPiezoelectric Actuators and ControlForce Microscopy Techniques and ApplicationsAdvanced Surface Polishing Techniques