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Mobility improvement of Zn1-xMgxO:Al prepared under room temperature by co-sputtering through optimizations of Al and Mg contents

Jakapan Chantana, Yuya Ishino, Yu Kawano, Takahito Nishimura, Takashi Minemoto

2020Materials Science in Semiconductor Processing19 citationsDOI

Topics & Concepts

Materials scienceSputteringAnalytical Chemistry (journal)MetallurgyThin filmNanotechnologyChemistryChromatographyZnO doping and propertiesGas Sensing Nanomaterials and SensorsCopper-based nanomaterials and applications
Mobility improvement of Zn1-xMgxO:Al prepared under room temperature by co-sputtering through optimizations of Al and Mg contents | Litcius