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A highly transparent humidity sensor with fast response speed based on α-MoO<sub>3</sub> thin films

Hailong Ma, Huajing Fang, Wenting Wu, Cheng Zheng, Liangliang Wu, Hong Wang

2020RSC Advances31 citationsDOIOpen Access PDF

Abstract

based humidity sensor exhibits extremely high transparency (85%) in the visible region and has short response and recovery times (0.97 and 12.11 s). In addition, it also shows high sensitivity, good logarithmic linearity and selectivity in a wide relative humidity range of 11% to 95%. The mechanism of humidity sensing was further studied by complex impedance spectroscopy. This novel metal oxide humidity sensor combined with high transparency and fast response speed is expected to broaden the application ranges of humidity sensors.

Topics & Concepts

HumidityMaterials scienceThin filmResponse timeOptoelectronicsNanotechnologyComputer scienceMeteorologyPhysicsComputer graphics (images)Gas Sensing Nanomaterials and SensorsAnalytical Chemistry and SensorsTransition Metal Oxide Nanomaterials
A highly transparent humidity sensor with fast response speed based on α-MoO<sub>3</sub> thin films | Litcius