Evaluation of the sp3/sp2 ratio of DLC films by RF-PECVD and its quantitative relationship with optical band gap
Hongxun Sheng, Wenwen Xiong, Songsheng Zheng, Chao Chen, Song He, Qijin Cheng
Topics & Concepts
Materials scienceX-ray photoelectron spectroscopyRaman spectroscopyPlasma-enhanced chemical vapor depositionBand gapFourier transform infrared spectroscopyFabricationAbsorption (acoustics)Solar cellAnalytical Chemistry (journal)Absorption spectroscopyThin filmNanotechnologyOptoelectronicsOpticsChemical engineeringComposite materialChemistryMedicineChromatographyEngineeringPathologyPhysicsAlternative medicineDiamond and Carbon-based Materials ResearchSilicon Nanostructures and PhotoluminescenceSemiconductor materials and interfaces