C-axis aligned crystalline indium-gallium-zinc oxide (CAAC-IGZO) and high-k charge trapping film for flash memory application
Soonoh Jeong, Seokmin Jang, Hoonhee Han, Hyeon Tae Kim, Changhwan Choi
Topics & Concepts
Materials scienceThin-film transistorOptoelectronicsAmorphous solidThreshold voltageHigh-resolution transmission electron microscopyNon-volatile memoryTransmission electron microscopyTransistorLayer (electronics)NanotechnologyElectrical engineeringChemistryCrystallographyVoltageEngineeringThin-Film Transistor TechnologiesSemiconductor materials and devicesSilicon Nanostructures and Photoluminescence